SIMULATION OF LASER PROCESSING OF THE STRUCTURE FILM

The research technique of sapphire laser treatment by use of progressive methods of numerical modeling, in particular finite element method is described in this article. Model of laser treatment of film–sapphire structure was developed. It allows analyzing the temperature distribution on the surface of structure film–sapphire with different laser scanning velocity. ANSYS software was used for simulation of laser treatment process.

Authors: S. P. Malyukov, Yu. V. Klunnikova, T. H. Bui

Direction: Physical Electronics and Technologies of Micro- and Nanostructures

Keywords: Structure film–sapphire, laser treatment, numerical simulation

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SIMULATION OF LASER PROCESSING OF THE STRUCTURE FILM–SAPPHIRE