METHODS OF INCREASING SENSITIVITY OF BACK-SIDE CHARGE-COUPLED DEVICES

Describes the basic methods of sensitizing the photosensitive surface of charge-coupled devices with the light from the substrate side (back-thinned or back-side charge coupled devices – BTCCD). Discussed in detail are the advantages and disadvantages of each method allowing the technology of BTCCD.

Authors: E. G. Lobanova

Direction: Physics Solid Body and Electronics

Keywords: Back-thinned charge coupled device, sensibilization, chemical adsorption, ion doping, laser annealing, molecular beam epitaxy

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