DETERMINATION OF GAS DISCHARGE PLASMA PARAMETERS USING SYNTHESIZED RADIATION SPECTRA
Formation of emission spectra of gas discharge plasma, synthesized using data on electronic transitions in substances under the assumption of local thermodynamic equilibrium is shown. Possibility of using these spectra to simplify the analysis of the plasma composition during the coating deposition process is demonstrated. Prospects of using synthesized spectra to determine the parameters of gas discharge plasma are discussed.
Authors: D. K. Kostrin, M. S. Ziatkova, A. N. Ramazanov, A. A. Lisenkov
Direction: Physical Phenomena in a Solid Body, Liquids and Gases
Keywords: Gas discharge plasma, emission spectrum, electronic transition, electronic temperature
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