ASSESSMENT OF USING OOFELIE::MULTIPHYSICS FOR MODELING SURFACE ACOUSTIC WAVE-BASED INERTIAL SENSORS

The possibility of using software OOFELIE::Multiphysics to perform computer modeling in LETI is discussed. The results obtained at the LINS department using the trial version of the system are shown.

Authors: D. P. Lukyanov, S. Yu. Shevchenko, A. S. Kukaev, E. P. Filippova

Direction: Instrument Engineering and Information Technology

Keywords: CAE, surface acoustic waves, FEM-modeling, microaccelerometer

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